Przegląd Elektrotechniczny

Oldest magazine of Polish electrician. It appears since 1919.

strona w języku polskim english page

No/VOL: 09/2022 Page no. 307

Authors: Krzysztof Mars , Mateusz Sałęga-Starzecki , Elżbieta Godlewska :

Title: Influence of the magnetron power mode on the properties of SnSe layers

Abstract: Tin selenide is intensively studied for applications in thermoelectric, photovoltaic and optoelectronic devices. As a semiconductor, it is characterized by low thermal conductivity, which makes the process of magnetron sputtering rather difficult. The aim of this work was to investigate the influence of different modes of magnetron power supply (DC or AC) on thermoelectric properties of the obtained films. The operating parameters (cathode-anode voltage and cathode current) were monitored by an oscilloscope for pulse frequencies 0.2-1kHz. Microstructure and composition of SnSe layers were analyzed by SEM and EDS..

Key words: SnSe layers, magnetron sputtering, thermoelectric materials