No/VOL: 09/2022 Page no. 251
Authors: Janusz Rybak , Konstanty Marszałek :
Title: Deposition and optical properties investigations of WO3 thin films for electrochromic device applications.
Abstract: Tungsten oxide WO3 thin films are one of the most widely used layers with electrochromic properties. Various deposition methods are used to produce them, including magnetron sputtering. In this paper the authors present the construction of a Lesker high vacuum system for GLAD Magnetron Sputtering and results of optical properties investigations of WO3 thin films which can be used for multilayer electrochromic systems.
Key words: electrochromism, tungsten oxide thin films, magnetron sputtering, optical properties