No/VOL: 09/2022 Page no. 247
Authors: Szymon Kiełczawa , Artur Wiatrowski :
Title: Specific method of deposition of aluminium-doped zinc oxide thin films on flexible glass substrates
Abstract: In this paper, we report specific method of controlling magnetron sputtering process by parameter named by the power supply manufacturer as “circulating power”. That parameter may be used to determine sputtering mode (metallic, transient, dielectric). Basing on the circulating power characteristics the AZO thin films were deposited onto conventional (non-bendable) and bendable glass substrates. The films were characterized by high optical transmittance (over 80% in visible light spectrum) and low resistivity, which was in range of 10-3 Ω∙cm.
Key words: magnetron sputtering, reactive sputtering, transparent electronics, flexible coatings